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US 6,587,579 B1Granted
Feature quality in array fabrication
AssigneeAgilent Technologies, Inc.
InventorJay K. Bass
Life of this patent
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Abstract
A method, and apparatus and computer program products for executing the method. The method includes obtaining a set of multiple images of a target feature location on an array of multiple features, each image of the set representing the target feature location following deposition of a corresponding sub-set of multiple droplets for that feature. An overlay composite may be generated from the image set. The overlay composite may be used as a quality control tool, or in interrogating the array or processing results of the interrogation.
Claims6
An apparatus for fabricating an array of features, comprising:
- a drop deposition system to deposit multiple reagent droplets for each of multiple target feature locations so as to form the array of features;
- an image capture system which provides a set of multiple images of a target feature location, each image of the set representing the target feature location following deposition of a corresponding subset of multiple droplets for that feature;
- and
- a processor which generates an overlay composite from the image set which comprises a region of overlap of the droplet sub-sets.
1 more element
Dependencies are inferred from the claim text.