Enhanced silicon and ceramic magnetoresistive read/write head and a method for producing the same

Abstract

An enhanced silicon and ceramic magnetoresistive read/write head and method for making the same is disclosed. The present invention provides reliable chemical mechanical polish etch stop by etching deep trenches into the silicon at the surrounding edges of the magnetic write and read device and filling it with a refractory metal (e.g. tungsten) so that the silicon wafer thickness will not significantly add to the length of the ABS nor to the gram load of the slider. An imbedded deformable pad will allow these bonded heads to have a high average fly height and reduce to near contact recording when reading and writing through an applied potential across a deformable pad in the silicon. The epoxy bond of the silicon to the ceramic slider consists of polymethyl methracrylate (PMMA) which can be spun on a wafer or a row of wafers with nanometer thickness repeatability and using low temperatures, i.e., <200° C.

Dependencies are inferred from the claim text.