Structure for electrically connecting microelectromechanical devices, in particular microactuators for hard disk drivers

A hard disk driver comprising:

• a suspension;
• a microactuator fixed to said suspension, said microactuator comprising:
• a movable part and a fixed part being separated from each other by trenches and being mechanically connected to each other by spring elements, and
• an electrical connection structure including a connection element extending between said movable part and said fixed part and being formed of electrically conductive material, said connection element being formed with plural sub-arms connected in parallel and having a common movable anchorage region anchored to said movable part and a common fixed anchorage region anchored to said fixed part;
• and
• a read/write head connected to said microactuator.

A microelectromechanical electrical interconnection structure comprising:

• a stator formed in a substrate;
• a rotor formed in said substrate and spaced apart from said stator;
• a plurality of suspension elements movably suspending said rotor relative to said stator;
• an electrical connection structure extending between and electrically coupling said rotor and said stator, said electrical connection structure including a connection arm having a plurality of electrically conductive sub-arms formed in parallel between a common movable anchorage point of said rotor and a stationary anchorage point of said stator and having a rectangular cross-section that minimizes structural resistance to relative planar motion between said rotor and said stator.