Enhance thermal stability through optical segmentation
AssigneeSilicon Light Machines Corporation
InventorsIlan Blech, Omar Leung
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AssigneeSilicon Light Machines Corporation
InventorsIlan Blech, Omar Leung
Estimating the term…
The current invention is directed to devices and systems with patterned reflective surfaces. The reflective surfaces are patterned with primary reflective regions and gap regions. The gap regions provide for separation between reflective material within adjacent primary reflective regions. The separation between reflective material reduces atomic flux which can lead to the depletion of the reflective material within regions of the reflective surface that are exposed to an intense light source. The primary reflective regions are preferably formed from a reflective material such as aluminum, silver, gold or platinum. The gap regions are left vacant or deposited with second material which is non-reflective, reflective or semi-reflective. The patterned reflective surface is preferably formed on a micro-structure, such an elongated ribbon. The patterned ribbon structure is preferably one of a plurality patterned ribbon structures in a grating light valve device.
A device for controllably reflecting an incident light, the device comprising a moveable structure with a segmented reflective surface, wherein the segmented reflective surface comprises a plurality of reflective regions each separated by gap regions.
An optical device comprising a segmented reflective ribbon structure with an active area for reflecting light, the active area comprising a plurality of reflective regions separated by gaps, wherein the gaps are 10 or less percent of the total active area of the ribbon.
A system comprising a light modulator, the light modulator comprising a plurality of movable segmented reflective ribbon structures for moving a distance of an integral multiple of a quarter of a predetermined wavelength to switch between the conditions for constructive and destructive interference with an incident light source having the predetermined wavelength, wherein the segmented reflective ribbon structures comprise a plurality of reflective surface segments formed from a first material and second material distributed in an alternating fashion.
A method of making a thermally stable segmented reflective surface on a micro structure comprising the steps of:
A system comprising
Dependencies are inferred from the claim text.