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US 6,587,009 B2Granted
Vibrating piece, vibrator, oscillator, and electronic equipment
AssigneeSeiko Epson Corporation
InventorsFumitaka Kitamura, Junichiro Sakata, Hideo Tanaya
Life of this patent
Estimating the term…
Abstract
A vibrating piece comprises a base and vibrating arms formed protruding from the base, wherein a groove is formed on at least one of the front side and rear side of the vibrating arms, and wherein notches are formed in the base.
Claims20
A vibrating piece comprising:
- a base;
- and
- vibrating arms formed protruding from said base;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms, and wherein notches are formed in said base.
1 more element
A vibrating piece comprising:
- a base;
- and
- vibrating arms protruding from said base;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms and notches are formed in said base, and wherein said vibrating arms are generally parallelepipeds, the width of the arm portion which is a short side of the front side thereof being between about 50 μm and about 150 μm.
1 more element
A vibrating piece comprising:
- a base;
- and
- vibrating arms protruding from said base;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction.
1 more element
A vibrating piece comprising:
- a base;
- and
- vibrating arms protruding from said base;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 40% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction.
1 more element
A vibrating piece comprising:
- a base;
- and
- vibrating arms protruding from said base;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction, and wherein a groove width which is a short side of an opening of said groove is 40% or more of said width of said vibrating arm.
1 more element
A vibrating piece comprising:
- a base;
- and
- vibrating arms protruding from said base;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction, and wherein a groove width which is a short side of an opening of said groove is between 70% and 100% of said width of said vibrating arm.
1 more element
A vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms of said vibrating piece, and wherein notches are formed in said base.
A vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms and notches are formed in said base, and wherein said vibrating arms are generally parallelepipeds, a width of the arm portion which is the short side of the front side thereof being between about 50 μm and about 150 μm.
A vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction.
A vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 40% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction.
A vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction, and wherein a groove width which is a short side of an opening of said groove is 40% or more of said width of said vibrating arm.
A vibrator comprising:
- a vibrating piece having a base and vibrating arms formed protruding from said base, said vibrator stored in a package;
- wherein a groove is formed on both of a front side and a rear side of said vibrating arms, and wherein a depth of a groove formed on either the front side or the rear side is between 30% and 50% of the thickness of said vibrating arm which is the full length thereof in the depth direction, and wherein a groove width which is a short side of an opening of said groove is between 70% and 100% of said width of said vibrating arm.
An oscillator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base;
- and
- an integrated circuit;
- said vibrating piece and integrated circuit stored in a package;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms of said vibrating piece, and wherein notches are formed in said base.
2 more elements
Electronic equipment including a vibrator connected to a control unit so as to use said vibrator, said vibrator comprising:
- a vibrating piece having a base and vibrating arms protruding from said base, said vibrating piece stored in a package;
- wherein a groove is formed on at least one of a front side and a rear side of said vibrating arms of said vibrating piece, and wherein notches are formed in said base.
Dependencies are inferred from the claim text.