Optically driven driver, optical output type voltage sensor, and IC testing equipment using these devices

An integrated circuit (IC) testing apparatus comprising:

• an optical test pattern generator that converts a test pattern signal received from a waveform generator into an optical test pattern signal;
• an optical driver optically coupled to said optical test pattern generator, wherein said optical driver converts the optical test pattern signal into an electric test pattern signal that represents the test pattern signal received from the waveform generator;
• a socket adapted to receive an IC for testing, wherein said socket is coupled to the optical driver to receive the electrical test pattern signal, applies said electrical test pattern signal to said IC for testing, and receives an IC test-response signal from said IC for testing in response to said electrical test pattern signal;
• an optical output type voltage sensor optically coupled to a light source and electrically coupled to the socket, wherein the optical output type voltage sensor generates interference light in response to the IC test-response signal and input light received from the light source;
• and
• a target photodetector optically coupled to the optical output type voltage sensor, wherein the target photodetector generates an electric output signal responsive to the interference light, and the electrical output signal is subjected to a logical comparison with an expected pattern signal to determine whether the IC is defective.

A method of testing an integrated circuit (IC);

• said method using an optical driver that includes a plurality of optical waveguides, a plurality of photoconductive elements optically coupled to the plurality of optical waveguides at one end thereof, a plurality of direct current (DC) voltage sources connected to the photoconductive elements at one end thereof, an output terminal connected in common to the other ends of said photoconductive elements, and a terminating resistor formed between the output terminal and an externally-connected electrode;
• said method comprising:
• converting a test pattern signal into an optical test pattern signal;
• receiving the optical test pattern signal and using the optical driver to generate an electrical test pattern signal in response thereto;
• applying said electrical test pattern signal to an IC;
• comparing a response of said IC to an expected response;
• and
• determining, responsive to said comparing, whether said IC is defective.