Method and device for inspecting a microactuator
AssigneeInternational Business Machines Corporation
InventorYoshikzu Takahashi
Life of this patent
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Abstract
A current value of each second harmonic content is measured while changing a frequency of an AC drive voltage applied to comb capacitors within a specified range. A frequency-current value characteristic is obtained for the second harmonic content, and the obtained characteristic is substituted with the vibration frequency-velocity characteristic of a microactuator.
Claims18
A method for inspecting a microactuator that comprises a capacitor having both poles thereof being freely displaced relative to each other with respect to an AC drive voltage and which displaces a specified object based on relative movements of both of the poles of said capacitor, said method comprising the steps of:
- supplying the AC drive voltage to said capacitor while changing a frequency thereof within a specified range;
- detecting a current value of a specified harmonic content of each frequency of the AC drive voltage from a current of said capacitor;
- detecting a relationship between a frequency, fa, and a current value, I, of said specified harmonic content as a first electric characteristic, fa-I, of said microactuator;
- and
- determining whether a mechanical characteristic of said microactuator is good or bad based on the first electric characteristic, fa-I, of said microactuator.
A mechanism for inspecting a microactuator that comprises a capacitor having both poles thereof being freely displaced relative to each other with respect to an AC drive voltage, and which displaces a specified object based on relative movements of both of the poles of the capacitor, said mechanism comprising:
- drive voltage supplying means for supplying the AC drive voltage to said capacitor while changing a frequency thereof within a specified range;
- current value detecting means for detecting a current value regarding a specified harmonic content with respect to each frequency of the AC drive voltage from a current of said capacitor;
- first electric characteristic detecting means for detecting a relation between a frequency fa and a current value I of said specified harmonic content as a first electric characteristic fa-I of said microactuator;
- and
- determining means for determining whether a mechanical characteristic of said microactuator is good or bad based on the first electric characteristic fa-I of said microactuator.
Dependencies are inferred from the claim text.