Packaged power devices having vertical power mosfets therein that are flip-chip mounted to slotted gate electrode strip lines
AssigneeSilicon Semiconductor Corporation
InventorBantval Jayant Baliga
Life of this patent
Estimating the term…
Abstract
Packaged power devices include an electrically conductive flange having a slot therein and an electrically conductive substrate mounted within the slot. A dielectric layer is provided on the electrically conductive substrate and a gate electrode strip line is patterned on the dielectric layer. The gate electrode strip line extends opposite the electrically conductive substrate. A vertical MOSFET is also provided. The vertical MOSFET has a source electrically coupled and mounted to a first portion of the flange located outside the slot and a gate electrode electrically coupled and mounted to a first end of the gate electrode strip line.
Claims11
A packaged power device, comprising:
- an electrically conductive flange having a slot therein that is recessed relative to a primary surface of said electrically conductive flange;
- an electrically conductive substrate mounted within the slot;
- a dielectric layer on said electrically conductive substrate;
- a gate electrode strip line that is patterned on said dielectric layer and extends opposite the electrically conductive substrate, said gate electrode strip line having an upper surface that is coplanar with the primary surface of said electrically conductive flange;
- and
- a vertical power MOSFET having a semiconductor region therein, a source electrode that extends adjacent a first surface of the semiconductor region and is electrically coupled and mounted to a first portion of the primary surface of said flange located outside the slot, a gate electrode that is electrically coupled and mounted to the upper surface at a first end of said gate electrode strip line and a drain electrode that extends adjacent a second surface of the semiconductor region, which is opposite the first surface.
A packaged power transistor, comprising:
- an electrically conductive flange having a slot therein that is recessed relative to a primary surface of said electrically conductive flange;
- a ceramic substrate mounted within the slot;
- a gate electrode strip line that is patterned on said ceramic substrate and extends opposite a bottom of the slot, said gate electrode strip line having an upper surface that is coplanar with the primary surface of said electrically conductive flange;
- and
- a vertical power MOSFET having a semiconductor region therein, a source electrode that extends adjacent a first surface of the semiconductor region and is electrically coupled and mounted to a first portion of said flange located outside the slot, a gate electrode that is electrically coupled and mounted to a first end of said gate electrode strip line and a drain electrode that extends adjacent a second surface of the semiconductor region, which is opposite the first surface.
A packaged power transistor device, comprising:
- an electrically conductive flange having a slot therein that is recessed relative to a primary surface of said electrically conductive flange;
- an integrated circuit substrate mounted to a bottom of the slot, said integrated circuit substrate comprising a semiconductor layer that is electrically coupled to said flange, a dielectric layer on the semiconductor layer and a gate interconnect on the dielectric layer, said gate interconnect comprising a gate electrode strip line having an upper surface that is coplanar with the primary surface of said electrically conductive flange;
- and
- a vertical power MOSFET having a semiconductor region therein, a source electrode that extends adjacent a first surface of the semiconductor region and is electrically coupled and mounted to a first portion of said flange located outside the slot, a gate electrode that is electrically coupled and mounted to the gate interconnect and a drain electrode that extends adjacent a second surface of the semiconductor region, which is opposite the first surface.
A packaged power transistor device, comprising:
- an electrically conductive flange having a slot therein that is recessed relative to a primary surface of said electrically conductive flange;
- an integrated circuit substrate mounted to a bottom of the slot, said integrated circuit substrate comprising a semiconductor layer that is electrically coupled to said flange, a dielectric layer on the semiconductor layer and a gate interconnect on the dielectric layer, said gate interconnect comprising a gate electrode strip line or a gate metal strap;
- and
- a vertical power MOSFET having a semiconductor region therein, a source electrode that extends adjacent a first surface of the semiconductor region and is electrically coupled and mounted to a first portion of said flange located outside the slot, a gate electrode that is electrically coupled and mounted to the gate interconnect and a drain electrode that extends adjacent a second surface of the semiconductor region, which is opposite the first surface;
- wherein said gate interconnect comprises a gate electrode strip line;
- wherein said gate electrode strip line comprises first and second strip line segments that are joined together by a capacitor electrode;
- wherein the capacitor electrode and the semiconductor layer collectively form opposing electrodes of a capacitor;
- and
- wherein an upper surface of said gate electrode strip line is coplanar with the primary surface of said electrically conductive flange.
Dependencies are inferred from the claim text.