Microlens, solid state imaging device, and production process thereof
AssigneeCanon Kabushiki Kaisha
InventorYasuhiro Sekine
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Abstract
A microlens of which surface is a conductive surface, or a solid state imaging device equipped with the microlens, in which the conductive surface can be given by a metal oxide film, a film containing carbon as a main component, a surface-modified film or the like.
Claims23
A microlens, a surface of which is coated with a light transmitting conductive film and a light transmitting low-refractive-index film with a refractive index lower than that of a component of the microlens, which said films are laminated on each other to form a structure in which the light transmitting conductive film is an upper layer and the light transmitting low-refractive-index film is a lower layer.
A solid state imaging device comprising a photoreceiving portion for performing a photoelectric conversion and a microlens provided on the photoreceiving portion, wherein a surface of the microlens is coated with a light transmitting conductive film and a low-refractive-index film with a refractive index lower than that of a component of the microlens, which said films are laminated on each other to form a structure in which the light transmitting conductive film is an upper layer and the light transmitting low-refractive-index film is a lower layer.
Dependencies are inferred from the claim text.