Capacitor with high dielectric constant materials
AssigneeMicron Technology, Inc.
InventorsCem Basceri, Gurtej S. Sandhu, Sam Yang
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Abstract
A stabilized capacitor using non-oxide electrodes and high dielectric constant oxide dielectric materials is provided. The stabilized capacitor comprises a non-oxide electrode with an oxidized upper surface. A high dielectric constant oxide dielectric material is adjacent to the oxidized upper surface of the non-oxide electrode. An upper layer electrode is adjacent to the high dielectric constant oxide dielectric material.
Claims8
A capacitor comprising a substrate, a non-oxide electrode having an oxidized upper surface adjacent said substrate, a high dielectric constant oxide dielectric material adjacent said oxidized upper surface of said non-oxide electrode, and an upper layer electrode adjacent said high dielectric constant oxide dielectric material.
A capacitor comprising a non-oxide electrode selected from the group consisting of TiN, TaN, WN, and W, an upper surface of said non-oxide electrode being oxidized, a high dielectric constant oxide dielectric material adjacent said upper surface of said non-oxide electrode, and an upper layer electrode adjacent said high dielectric constant oxide dielectric material.
A capacitor comprising a non-oxide electrode having an oxidized upper surface, a high dielectric constant oxide dielectric material is selected from the group consisting of Al2O3, Ta2O5 and BaxSr(1−x)TiO3 adjacent said upper surface of said non-oxide electrode, and an upper layer electrode adjacent said high dielectric constant oxide dielectric material.
A capacitor comprising a non-oxide electrode selected from the group consisting of TiN, TaN, WN, and W, an upper surface of said non-oxide electrode having been oxidized with an O3 gas plasma, a high dielectric constant oxide dielectric material selected from the group consisting of Al2O3, Ta2O5 and BaxSr(1−x)TiO3 adjacent to said oxidized upper surface of said non-oxide electrode, and an upper layer electrode adjacent said high dielectric constant oxide dielectric material.
Dependencies are inferred from the claim text.