Multipole electrostatic e-beam deflector
AssigneeInternational Business Machines Corporation
InventorsScott A. Messick, Joseph J. Senesi, Maris A. Sturans
Life of this patent
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Abstract
Forming poles from sectors of a tube of carbon or a material with similar conductive properties and supporting the poles by bonding an insulating support ring thereto before removing end rings formed at the ends of the tube which temporarily support the poles provides a multipole deflector element of robust structure of high dimensional accuracy and stability in which eddy current and charging effects are avoided. The manufacturing method is much simplified, reduced in cost and increased in reliability, repeatability and yield over manufacturing techniques for known multipole deflectors.
Claims12
A multipole deflector for a charged particle beam system, said multipole deflector including:
- a plurality of poles in the form of sectors of a tube formed from a conductive material having a bulk material resistivity of 100 microohm-cm or greater, said poles being supported by an insulating collar;
- and
- a sectored collar forming connections to respective poles of said plurality of poles, respective sectors of said collar being separated by respective slots.
A charged particle beam tool including:
- a multipole deflector element including a plurality of poles in the form of sectors of a tube formed from a conductive material having a bulk material resistivity of 100 microohm-cm or greater;
- and
- a sectored collar forming connections to respective poles of said plurality of poles, respective sectors of said collar being separated by respective slots.
A method of making a multipole deflector element for a charged particle beam tool comprising steps of:
- cutting slots in a tube of conductive/resistive material parallel to the axis of said tube thereby forming sectors in the tube, said slots stopping short of the tube length, thereby leaving end rings that support the sectors,
- bonding a ring of insulating material to said sectors between said end rings, and
- removing said end rings.
Dependencies are inferred from the claim text.