Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample

An electron beam apparatus for generating an image from a sample, comprising:

• an electron beam generator arranged to generate and control an electron beam that is directed substantially towards the sample;
• a detector arranged to detect charged particles emitted from the sample to allow generation of an image from the detected charged particles;
• one or more electrodes arranged proximal to the sample such that a predetermined voltage may be applied to one or more electrodes such that charge build up on the sample is controlled while the electron beam is directed at the sample, each of the one or more electrodes having an aperture through which the electron beam passes;
• and
• a processor for controlling a plurality of voltages to the one or more electrodes as a function of the electron beam's position.

An electron beam apparatus for generating an image from a sample, comprising:

• an electron beam generator arranged to generate and control an electron beam that is directed substantially towards the sample;
• a detector arranged to detect charged particles emitted from the sample to allow generation of an image from the detected charged particles;
• and
• one or more electrodes arranged proximal to the sample such that a predetermined voltage may be applied to one or more electrodes such that charge build up on the sample is controlled while the electron beam is directed at the sample, each of the one or more electrodes having an aperture through which the electron beam passes;
• wherein
• the one or more electrodes include a first and second electrode that each have bores through which the electron beam passes, the first electrode being placed between the second electrode and the sample, the second electrode being a ground electrode and the first electrode being a wehnelt electrode.

An electron beam apparatus for generating an image from a sample, comprising:

• an electron beam generator arranged to generate and control an electron beam that is directed substantially towards the sample;
• a detector arranged to detect charged particles emitted from the sample to allow generation of an image from the detected charged particles;
• and
• one or more electrodes arranged proximal to the sample such that a predetermined voltage may be applied to one or more electrodes such that charge build up on the sample is controlled while the electron beam is directed at the sample, each of the one or more electrodes having an aperture through which the electron beam passes;
• wherein
• the one or more electrodes include a first and second electrode that each have bores through which the electron beam passes, the first electrode being placed between the second electrode and the sample, the second electrode being a ground electrode, and wherein the first electrode is split into two halves such that a different or a same voltage may be applied to each half to control charge build up and to allow emitted particles to reach the detector.