US 6,586,703 B2 · Laser machining method, laser machining apparatus, and its control method · patentgrep

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Abstract

This is to present a laser machining method and a laser machining apparatus for drilling holes, capable of achieving conduction securely between adjacent conductive layers, by detecting the machining state of a workpiece adequately, and controlling the machining. For this purpose, the number of laser pulse outputs capable of machining securely is preset. During laser machining, reflected laser beam intensity from the workpiece and incident laser beam intensity are detected, and the machining state of the workpiece is detected. As a result, when judging the workpiece has reached a desired machining state, laser machining is finished if the number of times of laser machining has not reached the set number of laser pulse outputs. If it is judged that the workpiece has not reached the desired machining state, laser machining is finished when reaching the set number of laser pulse outputs. As a result, the laser machining method and laser machining apparatus capable of drilling holes of high quality at high yield and shortening the machining cycle time can be realized.

Claims40

Dependent claims

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting the number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached the desired machining state, if not reaching the set number of laser outputs, and otherwise continues the execution of laser machining up to the set number of laser outputs.

3 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting the number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached the desired machining state, if not reaching the set number of laser outputs, and otherwise continues the execution of laser machining up to the set number of laser outputs, and
an error is processed when judging said workpiece has not reached the desired machining state in the case of executing laser machining up to the set number of laser outputs.

4 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting the number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached a first desired machining state, if not reaching the set number of laser outputs, and otherwise continues the execution of laser machining up to the set number of laser outputs, and
said judging unit judges if reaching a second desired machining state in the case of executing laser machining up to the set number of laser outputs.

4 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting the number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached a first desired machining state, if not reaching the set number of laser outputs, and otherwise continues the execution of laser machining up to the set number of laser outputs,
said judging unit detects the machining state of the workpiece and judges if reaching a second desired machining state by laser machining in the case of executing laser machining up to the set number of laser outputs, and
an error is processed when not reaching the second desired machining state.

5 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting a first number of laser outputs and a second number of laser outputs smaller than the first number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector during execution of laser machining from the second number of laser outputs to the first number of laser outputs, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached the desired machining state, if not reaching the first number of laser outputs during laser machining after the second number of laser outputs, and otherwise continues the execution of laser machining up to the first number of laser outputs.

3 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting a first number of laser outputs and a second number of laser outputs smaller than the first number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector during execution of laser machining from the second number of laser outputs to the first number of laser outputs, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached the desired machining state, if not reaching the first number of laser outputs during laser machining after the second number of laser outputs, and otherwise continues the execution of laser machining up to the first number of laser outputs, and
an error is processed when judging said workpiece has not reached the desired machining state in the case of execution of laser machining up to the first number of laser outputs.

4 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting a first number of laser outputs and a second number of laser outputs smaller than the first number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector during execution of laser machining from the second number of laser outputs to the first number of laser outputs, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached a first desired machining state, if not reaching the first number of laser outputs during laser machining after the second number of laser outputs, and otherwise continues the execution of laser machining up to the first number of laser outputs, and
said judging unit judges if reaching a second desired machining state in the case of execution of laser machining up to the first number of laser outputs.

4 more elements

A laser machining apparatus comprising:

a laser output unit for drilling holes in a workpiece by plural times of laser pulse outputs,
a setting unit for setting a first number of laser outputs and a second number of laser outputs smaller than the first number of laser outputs as laser output condition,
a detector for detecting the machining state of said workpiece,
a judging unit for judging if reaching a desired machining state by a signal from the detector during execution of laser machining from the second number of laser outputs to the first number of laser outputs, and
a controller for controlling the laser output unit by receiving a signal from said judging unit,
wherein said controller finishes laser machining when judging said workpiece has reached a first desired machining state, if not reaching the first number of laser outputs during laser machining after the second number of laser outputs, and otherwise continues the execution of laser machining up to the first number of laser outputs,
said judging unit detects the machining state of said workpiece and judges if reaching a second desired machining state by laser machining in the case of execution of laser machining up to the first number of laser outputs, and
an error is processed if not reaching the second desired machining state.

5 more elements

A laser machining apparatus comprising a laser output unit for irradiating a laser beam, an optical system structure for guiding the laser beam into a workpiece, and a control unit for controlling the laser output unit, and further including an incident beam detector for detecting the intensity of the laser beam, a reflected beam detector for detecting the beam intensity of the reflected beam from said workpiece, a reflected beam distribution table storing the rate of change of the reflected beam from said workpiece until reaching the reflected beam detector in every machining position of said workpiece, and a reflected beam intensity calculator for calculating the reflected beam intensity right after reflection from said workpiece from the data of the reflected beam detector and the data of the reflected beam distribution table, wherein the laser output unit is controlled by the control unit according to the comparison between the relative reflected beam intensity operated from the incident beam intensity detected by the incident beam detector and the reflected beam intensity calculated by the reflected beam intensity calculator and its reference value.

Dependencies are inferred from the claim text.

Facts

Application: 09/873,529Filed 4 Jun 2001 · division
Priority: JP 9-34245312 Dec 1997
Published: US 2001/0027964 A111 Oct 2001
Granted: 1 Jul 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification15 codes

Family

Application09/367,343Parent of this division · filed 11 Aug 1999
US 2001/0027964 A1Pre-grant publication · published 11 Oct 2001
US 6,441,337 B1Parent of this division
US 6,586,703 B2This patent

From the US filing history. Foreign family members aren’t listed.

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