Methods for creating elements of predetermined shape and apparatus using these elements

A method for creating elements having a predetermined shape, said method comprising:

• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or an electron-mechanical element in a plurality of elements, said components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
• removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first substrate;
• etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
• releasing said plurality of elements from said first substrate;
• bonding said first face of said first substrate to a second substrate;
• and
• wherein said removing said layer comprises a mechanical process of one of grinding, lapping or polishing said first portion and wherein said method further comprises:
• combining said plurality of elements with fluid to form a slurry.

A method for creating elements having a predetermined shape, said method comprising:

• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or an electro-mechanical element in a plurality of elements, said components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
• removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first substrate;
• etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
• releasing said plurality of elements from said first substrate;
• bonding said first face of said first substrate to a second substrate;
• and
• wherein said first patterned mask is formed by aligning on said second face a plurality of shapes formed by said first patterned mask relative to functional components disposed on said first face and wherein said etching said second portion comprises first etching with an isotropic etchant and second etching with an anisotropic etchant, and wherein said method further comprises:
• combining said plurality of elements with a fluid to form a slurry.

A method for creating elements having a predetermined shape, said method comprising:

• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or an electro-mechanical element in a plurality of elements, said components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
• removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first face;
• etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
• releasing said plurality of elements from said first substrate;
• bonding said first face of said first substrate to a second substrate;
• and
• wherein said etching said second portion exposes at least a portion of each of said plurality of elements and wherein each of said plurality elements comprises at least one functional component which comprises an electrical component;
• and
• wherein each of said elements has a substantially quadrilateral cross section which is said predetermined shape which is designed to fit into an opening on a receiving substrate, and wherein each of said elements comprises a pixel driver and wherein said method further comprises:
• combining said plurality of elements with a fluid to form a slurry.

A method for creating elements having a predetermined shape, said method comprising:

• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or electro-mechanical element in a plurality of elements, said components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
• applying, after said fabricating, a release layer on said first face;
• etching said second face to expose at least a portion of each of said plurality of elements;
• etching said release layer;
• and
• wherein said etching said release layer releases said plurality of elements and wherein said method further comprises:
• combining said plurality of elements with a fluid to form a slurry after releasing said plurality of elements.

A method for creating elements having a predetermined shape, said method comprising:

• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or an electron-mechanical element in a plurality of elements, said plurality of components being disposed on a first face of said substrate which also has a second face;
• etching vertically, in a first etching process, regions of said first face which are adjacent to edges of said plurality of elements;
• etching laterally, in a second etching process, regions below said first face which are adjacent to said edges;
• releasing said plurality of elements from said first substrate;
• and
• combining said plurality of elements with a fluid to form a slurry.

A method for creating elements having a predetermined shape, said method comprising:

• depositing a first layer into a second layer;
• fabricating a plurality of a component having at least one of electrical, chemical, or an electro-mechanical element in a plurality of elements in said first layer;
• etching at least said first layer to determine said predetermined shape for each of said plurality of elements;
• etching said second layer such that a density of said second layer, after said etching of said second layer, is reduced;
• releasing said plurality of elements from said second layer after said etching of said second layer, wherein a thickness of said first layer is related to a depth of each of said plurality of elements;
• and
• combining said plurality of elements with a fluid to form a slurry.

A method of assembling a structure on a receiving substrate, said method comprising:

• dispensing a slurry over said receiving substrate having a plurality of openings, said slurry comprising a fluid and a plurality of shaped elements, wherein at least one of said shaped elements becomes disposed into one of said openings, and wherein said plurality of shaped elements were created by a method comprising:
• fabricating in a first substrate a plurality of a component having at least one of electrical, chemical, or an electro-mechanical element in a plurality of elements, said components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
• removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first substrate;
• etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
• releasing said plurality of elements from said first substrate;
• washing said receiving substrate after said dispensing.