Photo-conductive relay and method of making same
AssigneeAgilent Technologies, Inc.
InventorsYou Kondoh, Yasuhisa Kaneko, Tsutomu Takenaka
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Abstract
A photoconductive relay that comprises a light-emitting device, a photoconductive switching element and columns of a conductive, fusible material. The light-emitting device and the photoconductive switching element respectively include including a light-emitting region and a light-receiving region. The columns extend between the light-emitting device and the photoconductive switching element to locate the light-emitting region of the light-emitting device opposite the light-receiving region of the photoconductive switching element and separated from one another by a distance of no more than 100 μm.
Claims3
A method of making a photoconductive relay, the method comprising:
- providing a light-emitting device having a major surface including a light-emitting region and a photoconductive switching element having a major surface including light-receiving region;
- forming conductive pads on the major surface of the light-emitting device and connecting pads on the major surface of the photoconductive switching element;
- forming bumps of a conductive, fusible material on one of the conductive pads and the connecting pads;
- positioning the light-emitting device and the photoconductive switching element with the major surfaces opposite one another and the bumps contacting the other of the conductive pads and the connecting pads;
- melting the bumps, the molten bumps moving one of the light-emitting device and the photoconductive switching element relative to the other to align the light-emitting region and the light-receiving region, and defining a separation between the major surfaces;
- and
- solidifying the molten bumps to form columns interconnecting the light-emitting device and the photoconductive switching element with the separation no more than 100 μm.
Dependencies are inferred from the claim text.