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US 6,586,070 B1Granted
Thin film TiSixNy protective layer
AssigneeInternational Business Machines Corporation
InventorsQing Dai, Bruno Marchon, Michael Andrew Scarpulla, Richard Longstreth White, Bing K. Yen
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Abstract
A overcoat layer of TiSixNy for use on a magnetic thin film disk is disclosed. The overcoat of the invention has high hardness, provides corrosion protection and has low surface energy which reduces contaminant attraction. The TiSixNy film is conductive and, therefore, reduces the deleterious effects of tribocharging.
Claims21
A magnetic disk with a thin film layer structure comprising:
- a magnetic thin film;
- and
- a TiSixNy protective layer formed on the magnetic thin film where X is from about 15 to 55 at. %, Y is about 45 to 55 at. % and the remainder being titanium.
A method of depositing thin films comprising the steps of:
- placing one or more targets containing titanium and silicon in a sputtering chamber;
- introducing nitrogen gas into the sputtering chamber;
- and
- sputter depositing a thin film of TiSixNy as a protective layer onto an article having at least one magnetic thin film.
1 more element
A disk drive comprising:
- a magnetic transducer including a read and a write head for reading and writing magnetic transitions;
- a spindle;
- and
- a thin film disk mounted on the spindle to rotate in a confronting position in relation to the magnetic transducer, the thin film disk including magnetic material in which the magnetic transducer writes magnetic transitions;
- and
- a protective layer comprising TiSixNy over the magnetic material.
3 more elements
Dependencies are inferred from the claim text.