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US 6,585,947 B1Granted
Method for producing silicon nanoparticles
AssigneeThe Board of Trustess of the University of Illinois
InventorsMunir H. Nayfeh, Joel Therrien, Zain H. Yamani
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Abstract
A method for producing the silicon nanoparticle of the invention is a gradual advancing electrochemical etch of bulk silicon. Separation of nanoparticles from the surface of the silicon may also be conducted. Once separated, various methods may be employed to form nanoparticles into colloids, crystals, films and other desirable forms. The particles may also be coated or doped.
Claims18
A method for producing elemental silicon nanoparticles, the method comprising steps of:
- gradually advancing a silicon anode into an HF acid H2O2 etchant solution;
- providing a flow of electrical current to the silicon anode as it is gradually advanced and to a cathode in electrical contact with the etchant solution;
- separating the silicon anode from the etchant solution.
Dependencies are inferred from the claim text.