Method of manufacturing oxide thin film for bolometer
AssigneesNational Institute of Advanced Industrial Science and Technology, NEC Corporation
InventorsTetsuo Tsuchiya, Susumu Mizuta, Toshiya Kumagai, Tsutomu Yoshitake, Yuichi Shimakawa, Yoshimi Kubo
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Abstract
An oxide for use in a bolometer with an oxide thin-film formed is manufactured on an insulating substrate. Metal organic compound is dissolved in solvent to form solution during manufacturing the oxide thin-film. The solution is applied on the insulating substrate, and the applied solution is dried. A bond between carbon and oxygen is cut and decomposed by irradiating a laser ray with wavelength of 400 nm or less. A generated oxide is crystallized.
Claims26
A method for manufacturing an oxide for use in a bolometer with an oxide thin-film formed on an insulating substrate, comprising the steps of:
- dissolving metal organic compound in solvent to form solution during manufacturing the oxide thin-film;
- applying the solution on the insulating substrate;
- drying the applied solution;
- cutting and decomposing a bond between carbon and oxygen by irradiating a laser ray with wavelength of 400 nm or less;
- and
- crystallizing a generated oxide,
- the oxide thin-film being composed of a perovskite type Mn oxide represented by A1−x Bx Mn O3 (0<x<1), and
- intensity of radiation energy irradiated by measuring electrical resistance of the oxide thin-film being measured by the bolometer,
- wherein A is triatomic rare metal, and B is diatomic alkali rare metal.
Dependencies are inferred from the claim text.