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US 6,585,574 B1Granted
Polishing pad with reduced moisture absorption
OwnerBrian Lombardo, Rajeev Bajajinventors
Life of this patent
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Abstract
A polishing pad for use in chemical mechanical polishing (CMP) is disclosed. The polishing pad has a pad surface for polishing wafer surfaces. The pad surface is composed of a polymeric matrix material. The polishing pad also contains a polymeric additive which is defined in the polymeric matrix of the pad surface and in cells of the pad surface. The polymeric additive may include one of a polyurethane, a polyamide, a polyester, a polyacrylonitrile, a polyacrylate, a polymethacrylate, a polyvinylchloride, and a polyvinylidene chloride. The polymeric additive is configured to be hydrophilic so that the pad surface is wettable to enable improved slurry distribution over the pad surface.
Claims20
A polishing pad for use in chemical mechanical polishing (CMP), comprising:
- a pad surface for polishing wafer surfaces, the pad surface being composed of a polymeric matrix material, the polymeric matrix material being hydrophobic;
- and
- a polymeric additive being defined in the polymeric matrix of the pad surface and in cells of the pad surface, the polymeric additive includes one of a polyurethane, a polyamide, a polyester, a polyacrylonitrile, a polyacrylate, a polymethacrylate, a polyvinylchloride, and a polyvinylidene chloride;
- wherein the polymeric additive is configured to be hydrophilic such that the pad surface is rendered partially hydrophobic by the polymeric matrix material and partially hydrophilic by the polymeric additive making the pad surface wettable to enable improved slurry distribution over the pad surface.
1 more element
A polishing pad for use in chemical mechanical polishing (CMP), comprising:
- a pad surface for polishing wafer surfaces, the pad surface being composed of a relatively non-polar polymeric matrix material;
- an additive being defined in the polymeric matrix of the pad surface and in cells of the pad surface, the additive being a surfactant;
- wherein the additive is configured to be hydrophilic such that a portion of the pad surface made up of the polymeric matrix material is hydrophobic and the portion of the pad surface made up of the additive is hydrophilic so the pad surface is wettable to enable improved slurry distribution over the pad surface.
A polishing system including a polishing pad for use in chemical mechanical polishing (CMP), comprising:
- a pad surface for polishing wafer surfaces, the pad surface being composed of a polymeric matrix material, the polymeric matrix material being hydrophobic, the polymeric matrix material includes one of a thermoplastic material and a cross-linked material;
- and
- a polymeric additive being defined in the polymeric matrix of the pad surface and in cells of the pad surface, the polymeric additive includes one of a polyurethane, a polyamide, a polyester, a polyacrylonitrile, a polyacrylate, a polymethacrylate, a polyvinylchloride, and a polyvinylidene chloride;
- the additive is configured to be hydrophilic such that the pad surface is wettable to enable improved slurry distribution over the pad surface, and the polymeric matrix material is configured to absorb less than about 4% moisture by weight;
- wherein the thermoplastic material is selected from the group consisting of a polytetrafluoroethylene material, a polyethylene material, an acrylonitrile butadiene styrene (ABS) material, a polypropylene material, a fluoronated polymer material, a polyurethane material, a thermoplastic elastomer material, and a polycarbonate material;
- wherein the cross-linked material is selected from the group consisting of a polyurethane material, a phenolic material, an epoxy material, a natural or synthetic rubber material, and a thermoset material.
3 more elements
A polishing pad, comprising:
- a pad surface for polishing wafer surfaces, the pad surface being composed of a polymeric matrix material, the polymeric matrix material being hydrophobic, the polymeric matrix material includes one of a thermoplastic material and a cross-linked material, and the polymeric matrix material is defined by cells that extend into the pad, and some cells at the pad surface defining invaginated features for receiving the slurry;
- and
- a polymeric additive being defined in the polymeric matrix of the pad surface and in cells of the pad surface, the polymeric additive includes one of a polyamide and a polyester, the additive is configured to be hydrophilic such that the pad surface is rendered partially hydrophobic by the polymeric matrix material and partially hydrophilic by the polymeric additive making the pad surface wettable to enable improved slurry distribution over the pad surface;
- wherein the thermoplastic material is selected from the group consisting of a polytetrafluoroethylene material, a polyethylene material, an acrylonitrile butadiene styrene (ABS) material, a polypropylene material, a fluoronated polymer material, a polyurethane material, a thermoplastic elastomer material, and a polycarbonate material;
- wherein the cross-linked material is selected from the group consisting of a polyurethane material, a phenolic material, an epoxy material, a natural or synthetic rubber material, and a thermoset material.
2 more elements
A polishing pad for use in chemical mechanical polishing (CMP), comprising:
- a pad surface for polishing wafer surfaces, the pad surface being composed of a hydrophobic polymeric matrix material;
- and
- a polymeric additive being defined in the polymeric matrix of the pad surface and in cells of the pad surface, the polymeric additive being a polyamide;
- wherein a portion of the pad surface made up of the polymeric matrix material is hydrophobic and the portion of the pad surface made up of the additive is hydrophilic.
1 more element
Dependencies are inferred from the claim text.