Back to results
US 6,585,480 B2Granted
Turbo-molecular pump
AssigneeEbara Corporation
InventorsHiroyuki Kawasaki, Hiroshi Sobukawa
Life of this patent
Estimating the term…
Abstract
A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.
Claims5
A turbo-molecular pump comprising:
- a casing;
- a stator fixedly mounted in said casing;
- a rotor supported in said casing and being rotatable at a high speed;
- and
- a turbine blade pumping assembly and a thread groove pumping assembly which are disposed between said stator and said rotor;
- said rotor being formed by joining at least two components which are separable from each other in said thread groove pumping assembly.
3 more elements
Dependencies are inferred from the claim text.