Structure and method for fabricating an electro-rheological lens

A process for fabricating an optical semiconductor structure comprising:

• providing a monocrystalline silicon substrate;
• depositing a monocrystalline perovskite oxide film overlying the monocrystalline silicon substrate, the film having a thickness less than a thickness of the material that would result in strain-induced defects;
• forming an amorphous oxide interface layer containing at least silicon and oxygen at an interface between the monocrystalline perovskite oxide film and the monocrystalline silicon substrate;
• epitaxially forming a monocrystalline compound semiconductor layer overlying the monocrystalline perovskite oxide film;
• forming an optical semiconductor device overlying the monocrystalline silicon substrate;
• depositing a insulating material overlying the optical device, wherein the insulating material provides an optical aperture;
• depositing a conductive material in contact with the insulating material;
• and
• inserting an electro-rheological lens in contact with the conductive material and the insulating material.

A system for fabricating a semiconductor structure comprising:

• means for providing a monocrystalline silicon substrate;
• means for depositing a monocrystalline perovskite oxide film overlying the monocrystalline silicon substrate, the film having a thickness less than a thickness of the material that would result in strain-induced defects;
• means for forming an amorphous oxide interface layer containing at least silicon and oxygen at an interface between the monocrystalline perovskite oxide film and the monocrystalline silicon substrate;
• means for epitaxially forming a monocrystalline compound semiconductor layer overlying the monocrystalline perovskite oxide film;
• means for forming an optical semiconductor device overlying the monocrystalline silicon substrate;
• means for depositing a insulating material overlying the optical device, wherein the insulating material provides an optical aperture;
• means for depositing a conductive material in contact with the insulating material;
• and
• means for inserting an electro-rheological lens in contact with the conductive material and the insulating material.