Method for operating a film leak detector and film leak detector suitable for carrying out this method
AssigneeInficon GmbH
InventorsRudolf Flosbach, Rudi Widt
Life of this patent
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Abstract
A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.
Claims18
A method for operating a film leak apparatus, said apparatus comprising two films each stretched in a frame, which, with a test sample emplaced, delimit a test chamber, said apparatus further being equipped with two vacuum pumps, selectively connected to said test chamber and a leak detector, said method including the steps of evacuating the test chamber and, after the evacuation step, switching to a sensitive leak detection operation step wherein during the evacuation step of the test chamber only a first one of the two vacuum pumps is operated and during the sensitive leak detection operation step only a second of the two vacuum pumps is operated.
A film leak detecting apparatus, comprising:
- two films each stretched in a frame, which, with a test sample emplaced, delimit a test chamber;
- two vacuum pumps selectively connected to said test chamber;
- a leak detector, wherein a first of the two vacuum pumps is solely used to evacuate the test chamber such that if said test sample bursts that contamination will not reach the leak detector and, after the evacuation operation, a sensitive leak detection operation step takes place during which only a second of the two vacuum pumps is operated;
- and
- a control center for automatically controlling the operation of said apparatus.
Dependencies are inferred from the claim text.