Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof

A membraneless piezoelectric/electrostrictive microactuator comprising:

• a chamber plate having a removed region with a predetermined pattern to form a chamber;
• a lower electrode covering the chamber and having a surface overlying the chamber plate outside the removed region;
• a bonding layer bonding the chamber plate outside the removed region and the lower electrode surface;
• a piezoelectric/electrostrictive film formed to overlay the lower electrode, and vibrating in a vertical polarization direction towards and away from the lower electrode when electrified;
• and
• an upper electrode formed on a portion of the piezoelectric/electrostrictive film overlying substantially the entire removed region and cooperating with the lower electrode to electrify the piezoelectric/electrostrictive film by polarizing it along its thickness;
• wherein, the piezoelectric/electrostrictive film is caused to remain on a region overlying substantially the entire removed region of the chamber plate by etching the region outside the removed region of the chamber plate.