Incrementally resolved phase-shift conflicts in layouts for phase-shifted features
AssigneeNumerical Technologies, Inc.
InventorsShao-Po Wu, Yao-Ting Wang
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AssigneeNumerical Technologies, Inc.
InventorsShao-Po Wu, Yao-Ting Wang
Estimating the term…
Phase shifting generates features in a printed features layer, such as a printed circuit, that are narrower than the features on a fabrication layout, such as a mask, projected onto the printed features layer using the same optical system without phase shifting. Techniques for forming a fabrication layout for a physical design layout having critical features employing phase shifting include techniques for providing a layout for shifters. The techniques include establishing placement of multiple pairs of shifters for a set of critical features. A critical feature employs phase shifting. The set of critical features constitutes a subset of all critical features in a layout. After establishing placement of the pairs of shifters, phase information for the shifters associated with the set of critical features is assigned. This and related techniques expedite resolving phase-shift conflicts in fabrication layouts for phase-shifted features. Complex designs can lead to phase-shift conflicts among shifters in the fabrication layout. According to these techniques, a conflict that cannot be resolved by a fabrication design process is passed to the design process earlier than in a conventional processes, saving valuable time in the fabrication process for printed circuits.
A method for conserving resource use in a computer system for designing a fabrication layout for an IC layout represented as a hierarchical design tree comprised of a plurality of cells, the method comprising:
A method for providing a layout for shifters, the method comprising the steps of:
A computer system for producing a physical design layout with shifters, the system comprising:
A system for producing a layout with shifters, the system comprising:
A computer readable medium for aiding the formation of a fabrication layout for a physical design layout with critical features requiring phase shifting, the computer readable medium carrying instructions to cause one or more processors to perform the steps of:
Dependencies are inferred from the claim text.