Apparatus and system for multivariate spectral analysis
AssigneeSandia Corporation
InventorsMichael R. Keenan, Paul G. Kotula
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AssigneeSandia Corporation
InventorsMichael R. Keenan, Paul G. Kotula
Estimating the term…
An apparatus and system for determining the properties of a sample from measured spectral data collected from the sample by performing a method of multivariate spectral analysis. The method can include: generating a two-dimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and ST, by performing a constrained alternating least-squares analysis of D=CST, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used by a spectrum analyzer to process X-ray spectral data generated by a spectral analysis system that can include a Scanning Electron Microscope (SEM) with an Energy Dispersive Detector and Pulse Height Analyzer.
A spectrum analyzer for determining the properties of a sample from measured spectral data collected from the sample;
A spectrum analyzer for determining the properties of a sample from measured spectral data collected from the sample;
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