Method and apparatus for process control of semiconductor device fabrication line

A process control method for a semiconductor device fabrication line, using a lot-base management host computer that performs management for each lot by managing a process condition for each lot, a correspondence between a carrier ID and a lot ID, and a correspondence between a slot ID and a wafer ID in each lot;

• a wafer-base management host computer that performs management for each wafer in a lot by managing a process condition corresponding to a wafer number in a lot;
• and a converted condition instructing section that transmits data acquired from the lot-base management host computer and the wafer-base management host computer to a semiconductor fabrication apparatus,
• said method comprising the steps of:
• acquiring at the converted condition instructing section a process condition for the lot, slot ID information and wafer ID information from the lot-base management host computer, when the semiconductor fabrication apparatus inquires to the converted condition instructing section about lot information based on the ID of a carrier loaded thereinto;
• and
• acquiring at the converted condition instructing section, in a case where wafers in process are experimental wafers, information of each wafer in the lot from the wafer-base management host computer;
• and
• transmitting a process condition corresponding to the slot ID to the semiconductor fabrication apparatus.

A process control apparatus for a semiconductor device fabrication line comprising:

• a lot-base management host computer that performs management for each lot by managing a process condition for each lot, a correspondence between a carrier ID and a lot ID, and a correspondence between a slot ID and a wafer ID in each lot;
• and
• a wafer-base management host computer that performs management for each wafer in a lot by managing a process condition corresponding to a wafer number in the lot;
• and
• a converted condition instructing section that transmits data acquired from the lot-base management host computer and the wafer-base host computer to a semiconductor fabrication apparatus;
• wherein the lot-base management host computer stores process conditions for respective levels and machine numbers of semiconductor fabrication apparatuses in use in the form of a matrix using experimental steps and wafer numbers as a master for experimental levels and issues a process condition to the semiconductor fabrication apparatus through the converted condition instructing section according to the master for experimental levels.