X-ray mapping analysis method
AssigneeSeiko Instruments Inc.
InventorKiyoshi Hasegawa
Life of this patent
Estimating the term…
Abstract
In order to acquire typical X-ray spectra by dividing automatically dividing contained matter and regions where the density thereof differs into groups in X-ray mapping analysis, measurement starts with the spectra database empty, a designated location within the sample is irradiated with a primary beam by the primary beam control means, the sample is irradiated with the primary beam for a fixed period of time in order to acquire a measurement spectrum, the X-ray spectrum obtained through measurement and X-ray spectra in the spectra database are compared by the X-ray comparison means, the X-ray spectrum obtained through measurement is added to the database when no matching X-ray spectra exists in the database, and measurement is repeated at a designated measurement point.
Claims7
An X-ray mapping analysis method for putting typical spectra existing in a sample into a database in an X-ray mapping device, which has a spectra database capable of registering X-ray spectra during measurement, comprising the steps of:
- starting measurement with the spectra database empty;
- irradiating a designated location within a sample with a primary beam using a primary beam control means;
- irradiating the sample with the primary beam for a fixed period of time in order to acquire a measurement spectrum;
- comparing the X-ray spectrum obtained through measurement and X-ray spectra in the spectra database using a X-ray comparison means;
- adding the X-ray spectrum obtained through measurement to the database when no matching X-ray spectra exists in the database;
- and repeating measurement at a designated measurement point.
Dependencies are inferred from the claim text.