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US 6,584,126 B2Granted
Tunable Fabry-Perot filter and tunable vertical cavity surface emitting laser
AssigneeCoreTek, Inc.
InventorsPeidong Wang, Daryoosh Vakhshoori, Parviz Tayebati
Life of this patent
Estimating the term…
Abstract
A tunable Fabry-Perot filter and a tunable vertical cavity surface emitting laser (VCSEL) are disclosed, where both devices utilize an improved dome structure for creating an internal air gap.
Claims20
A tunable Fabry-Perot filter comprising:
- a bottom mirror mounted to the top of a substrate;
- a bottom electrode mounted to the top of said bottom mirror;
- a thin membrane support atop said bottom electrode;
- a top electrode fixed to the underside of said thin membrane support;
- a reinforcer fixed to the outside perimeter of said thin membrane support;
- and
- a confocal top mirror set atop said thin membrane support, with an air cavity being formed between said bottom mirror and said top mirror;
- and with said thin membrane support being in the form of a dome with openings therein, with said openings being small enough, and with sufficient distance therebetween, so as to the overall structural not affect the overall structure of said dome, while still allowing chemical access to the region inside the dome.
5 more elements
A tunable laser comprising:
- a substrate;
- a bottom mirror mounted to the top of said substrate;
- a gain region mounted to the top of said bottom mirror;
- a bottom electrode mounted to the top of said gain region;
- a thin membrane support atop said bottom electrode;
- a top electrode fixed to the underside of said thin membrane support;
- a reinforcer fixed to the outside perimeter of said thin membrane support;
- and
- a confocal top mirror set atop said thin membrane support;
- with an air cavity being formed between said bottom mirror and said top mirror;
- and with said thin membrane support being in the form of a dome with openings therein, with said openings being small enough, and with sufficient distance therebetween, so as to the overall structural not affect the overall structure of the dome, while still allowing chemicals to be introduced into the region inside the dome.
8 more elements
Dependencies are inferred from the claim text.