Micromechanical device and method for non-contacting edge-coupled operation

Abstract

A new non-contacting, edge-coupled micromechanical device and method, requiring no contact between the mirror or underlying yoke and landing pads on the substrate. Elimination of physical contact eliminates the problem of “sticking” mirrors found in conventional devices, and simplifies the manufacturing process by reducing the requirements for passivation coatings and hermetic packages. A capture electrode 24 is provided at an appropriate elevation above the surface of the device so as to be in close proximity with the edge of the mirror 20 or yoke 22 when it rotates to the desired angle. The capture electrode 24 and mirror assembly are biased to establish a very high electrostatic attraction between the two which stops the mirror. The mirror can be critically damped to prevent oscillations of the mirrors by tailoring at least one of the voltages applied to the mirror and capture electrode.

Dependencies are inferred from the claim text.