Stage device, an exposure apparatus and a device manufacturing method using the same
AssigneeCanon Kabushiki Kaisha
InventorsYoshikazu Miyajima, Tsuneo Takashima, Yukio Takabayashi
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Abstract
A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.
Claims24
An exposure apparatus comprising:
- an illumination system for illuminating a substrate with radiation;
- and
- a stage device including a chuck for holding the substrate to be exposed, said stage device comprising a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding said movable body along the guide surface, said at least one pad being attached to said movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving said movable body, said movable part of said linear motor being attached to said movable body at a second position,
- wherein said movable body has a hollow structure at at least one of the first position and the second position.
A device manufacturing method for manufacturing micro-devices, said method comprising:
- illuminating a substrate with radiation, using an illumination system;
- moving an element mounted on a movable body of a stage device of an exposure apparatus, the movable body being movable along a guide surface;
- guiding the movable body along the guide surface using a static pressure bearing, having at least one pad, the at least one pad being attached to the movable body at a first position;
- moving the movable body with a linear motor, having a movable part and a relatively stationary part, the movable part of said linear motor being attached to said movable body at a second position, wherein the movable body has a hollow structure at at least one of the first position and the second position;
- and
- exposing the substrate with radiation to manufacture micro-devices.
Dependencies are inferred from the claim text.