Self alignment of substrates by magnetic alignment
AssigneeInternational Business Machines Corporation
InventorsAlessandro C. Callegari, Praveen Chaudhari, James P. Doyle, Eileen A. Galligan, James A. Lacey, Shui-Chih Alan Lien, Sampath Purushothaman, John J. Ritsko, James J. Speidell
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