Plane magnetic sensor and plane magnetic sensor for multidimensional magnetic field analysis

A plane magnetic sensor, comprising:

• a plurality of sensing layers composed of arbitrary-sized plane magnetoresistance effect films, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic particles change according to the strength of a magnetic field;
• and
• a plurality of conductor layers which are laminated between magnetoresistance effect films to compose said sensing layers and on outer surfaces of the magnetoresistance effect films to compose said sensing layers arranged outside, and are composed of a plurality of line conductor films formed in linear shapes along directions of respective surfaces with predetermined intervals therebetween,
• wherein the line conductor films to compose said conductor layers are arranged to intersect to each other in plan view, with the magnetoresistance effect film therebetween.

A plane magnetic sensor for a multidimensional magnetic field analysis, comprising:

• a plane magnetic sensor comprising a plurality of sensing layers composed of arbitrary-sized plane magnetoresistance effect films, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic particles change according to the strength of a magnetic field, and a plurality of conductor layers which are laminated between magnetoresistance effect films to compose said sensing layers and on outer surfaces of the magnetoresistance effect films to compose said sensing layers arranged outside, and are composed of a plurality of line conductor films formed in linear shapes along directions of respective surfaces with predetermined intervals therebetween, wherein the line conductor films to compose said conductor layers are arranged to intersect to each other in plan view, with the magnetoresistance effect film therebetween;
• and
• at least one other plane magnetic sensor including a sensing layer which is composed of an arbitrary-sized plane magnetoresistance effect film having a magnetic anisotropy, and conductor layers which are laminated on the respective surfaces of the sensing layer and are formed by a plurality of line conductor films formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween, with the line conductor films of one conductor layer and the line conductor films of the other conductor layer being arranged to intersect to each other in plan view with the magnetoresistance effect film therebetween,
• wherein the plane magnetic sensors are laminated via an insulation member so that a magnetoresistance change can be detected multidirectionally.