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US 6,583,614 B2Granted
Inspection stage and inspection apparatus having a plurality of Z axes
AssigneeTokyo Electron Limited
InventorKiyoshi Takekoshi
Life of this patent
Estimating the term…
Abstract
An inspection stage including a chuck top, a rectangular Z base, an X stage, a Y stage, and a Z axis elevating mechanism. The chuck top is used for mounting a wafer W. The Z base is provided with the chuck top and is vertically movable. The X stage elevatingly supports the Z base and is movable in an X direction. The Y stage movably supports the X stage in the X direction and is movable in a Y direction. The Z axis elevating mechanism is provided at each of the four corners of the Z base in such a manner as to surround the chuck top.
Claims8
An inspection stage comprising:
- a chuck top on which a test sample is mounted;
- a vertically movable support for supporting said chuck top;
- a support elevating mechanism having at least four Z axes for supporting said support and at least four Z axis elevating mechanisms for elevating each Z axis;
- an X stage capable of movement in an X direction for mounting said support elevating mechanism;
- and
- a Y stage capable of movement in a Y direction for mounting said X stage.
3 more elements
Dependencies are inferred from the claim text.