Electro-optical element having protective film on top and side surfaces of buffer layer
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsHirotoshi Nagata, Yasuyuki Miyama
Life of this patent
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Abstract
An electro-optic element comprising a ferroelectric substrate comprising a single crystal having an electro-optic effect, in which an optical waveguide is formed by thermal diffusion of titanium in a main face, and in which an axis in which said electro-optic effect is induced is parallel to said main face; a heat treated buffer layer provided on said ferroelectric substrate on a side in which said optical waveguides are formed; electrodes provided on a part of the buffer layer; and a protective film for preventing contamination of the buffer layer provided on at least the region of the buffer layer on which the electrodes are not formed.
Claims5
An electro-optic element comprising:
- a ferroelectric substrate comprising a single crystal having an electro-optic effect, in which an optical waveguide is formed by thermal diffusion of titanium in a main face, and in which an axis in which said electro-optic effect is induced is parallel to said main face;
- a heat treated buffer layer provided on said ferroelectric substrate on a side in which said optical waveguide is formed;
- electrodes provided on a part of said buffer layer;
- a protective film provided over an entirety of a surface of said buffer layer including regions on which said electrodes are formed and on side surfaces of said buffer layer with respect to the optical waveguide direction.
Dependencies are inferred from the claim text.