Integrated electronic-optoelectronic devices and method of making the same

An integrated electronic-optoelectronic module comprising:

• a composite substrate comprising a thin layer of silicon on a transparent, insulating substrate;
• at least one electronic device fabricated in the thin layer of silicon;
• and
• at least one optoelectronic device bonded to the composite substrate and in electrical communication with at least one electronic device fabricated in the thin layer of silicon;
• wherein the thin layer of silicon has been oxidized to an optically clear oxide in an area aligned with at least one optoelectronic device for transmission of radiation from or to said optoelectronic device through said optically clear oxide in said area.