Method and wafer for maintaining ultra clean bonding pads on a wafer
AssigneeKeteca Singapore Singapore
InventorsRobert Carrol Runyon, Che Kiong Hor
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Abstract
The present invention teaches a sawn wafer with ultra clean bonding pads on die which enhance the strength of wire bond and results in higher yield and improved reliability of packaged semiconductor die. Clean wafers ready for dicing are coated with a removable insulating water soluble non-ionic film which enhances clean saw cuts and reduces buildup. The protective film is hardened by heat and resists removal by cooling water used in dicing saws. However, after dicing the protective film is removable in a wafer washer using high pressure warm D.I. water. After removal of the protective film the electrode pads are virtually as clean as before dicing. The film may be used as a protective layer until the sawn wafer is ready for use.
Claims11
A method of protecting wafer bonding pads from silicon wafer dust and contamination during singulation or Dicing, comprising the steps of:
- providing a clean wafer to be saw cut mounted on a dicing tape;
- applying a neutral hardened water soluble film over the surface of the wafer to be cut;
- sawing through said water soluble film and said wafer and partially into said dicing tape;
- cooling said wafer with clean cool water while sawing the wafer without removing the water soluble film;
- washing said wafer in a wafer washer using high pressure clean warm deionized water to remove said neutral hardened water soluble film from the surface of individual sawn die and from the sawn kerf in said wafer;
- and
- drying said wafer prior to removing individual die from said wafer mounted on said dicing tape.
A method of protecting wafer bonding pads from silicon wafer dust and contamination during separation from a wafer by a sawing operation, comprising the steps of:
- mounting a clean wafer to be sawn into die on a first dicing tape;
- applying a first neutral hardenable water soluble film on the top surface of the wafer to be sawn;
- hardening the water soluble film to prevent it from dissolving in cool water;
- sawing through said water soluble film and partially into said wafer;
- washing said sawn wafer in a wafer washer to remove the wafer dust and water soluble film;
- drying said washed and sawn wafer;
- applying a second neutral hardenable water soluble film on the top surface of the wafer and into the sawn kerfs of said wafer;
- hardening and drying said second neutral hardenable water soluble film;
- applying a back grinding tape on top of said second film;
- removing said dicing tape from the bottom of said partially sawn wafer;
- removing a portion of the bottom of said wafer to separate the wafer into individual die having extremely clean edges on the die;
- washing said sawn wafer in a wafer washing to remove wafer dust;
- drying said washed and sawn wafer;
- mounting said washed and sawn dry wafer on a second dicing tape;
- and
- removing said back grinding tape and said neutral hardenable water soluble film or films from said wafer to provide individual die with burr and crack free edges.
Dependencies are inferred from the claim text.