Reactive photo acid-generating agent and heat-resistant photoresist composition with polyamide precursor

A photo-polymerization method comprising:

• (i) using a photoresist composition comprising an effective amount of a molecular-weight regulator, and (ii) photo-patterning said photoresist composition;
• wherein said molecular weight regulator comprises a photo acid-generating agent expressed by the following formula (1),
• wherein:
• represents
• in which X represents —CH2—, —O—, —S—, —SO2—, —CO—, —NHCO—, —C(CH3)2—, —C(CF3)2—, or
• in which X represents —CH2—, —S—, —SO—, —CO—, —NHCO—, —C(CH3)2—, or
• and
• R represents —CH3, —C2H5, —C3H7, —C4H9, —CF3,

A heat-resistant photoresist composition comprising:

• (i) an aromatic bis-sulphonic diimide expressed by the following formula (1) as a photo acid-generating agent, and
• (ii) a polyamide oligomer having ester groups as pendent groups expressed by the following formula (2),
• wherein the composition comprises the aromatic bis-sulphonic diimide expressed by formula (1) in an amount ranging from 0.3 to 15 wt % relative to a weight of the polyamide oligomer having ester groups as pendent groups expressed by formula (2);
• represents
• in which X represents —CH2—, —O—, —S—, —SO2—, —CO—, —NHCO—, —C(CH3)2—, —C(CF3)2—, or
• and R represents —CH3, —C2H5, —C3H7, —C4H9, —CF3,
• wherein Ar1 is a quaternary aromatic group which is selected from the group consisting of
• Ar2 is a secondary aromatic group which is selected from the group consisting of
• X1 is —CH2—, —O—, —S—, —SO2—, —CO—, —NHCO—, —C(CH3)2—, —C(CF3)2—,
• R1 and R2 are independently a hydrogen atom or C1-C10 alkyl having
• wherein R′ is a C1-C6 alkyl such as ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl and cyclohexyl;
• and z is an integer of 1-4, with the proviso that both R1 and R2 are not hydrogen atoms;
• R3 and R4 are independently a hydrogen atom,
• which exist at the terminal portion of the molecule added to adjust the molecular weight of the oligomer;
• and
• a degree of polymerization (m+n) is 3-50.