Method of forming three-dimensional photonic band structures in solid materials
AssigneeMicron Technology, Inc.
InventorsJoseph E. Geusic, Kevin G. Donohoe
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Abstract
A method of forming a periodic index of refraction pattern in a superlattice of a solid material to achieve photonic bandgap effects at desired optical wavelengths is disclosed. A plurality of space group symmetries, including a plurality of empty-spaced buried patterns, are formed by drilling holes in the solid material and annealing the solid material to form empty-spaced patterns of various geometries. The empty-spaced patterns may have various sizes and may be formed at different periodicities, so that various photonic band structures can be produced for wavelength regions of interest.
Claims71
A method of modifying the energy band characteristics of an atomic lattice of a solid material, comprising the act of forming at least one unit cell beneath a surface of, and within, said solid material, said unit cell comprising a plurality of empty-spaced regions arranged in a pattern, said empty space regions being surrounded by said solid material.
A method of forming a space lattice in a solid material, said method comprising the steps of:
- forming a first plurality of cylindrical holes in said solid material;
- annealing said solid material to form a first plurality of empty-spaced patterns within, and surrounded by, said solid material and below a surface of said solid material;
- forming a second plurality of cylindrical holes in said solid material, said second plurality of cylindrical holes being located parallel to said first plurality of cylindrical holes relative to said surface of said solid material;
- and
- annealing said solid material to form a second plurality of empty-spaced patterns within, and surrounded by, said solid material and below said surface of said solid material.
A method of altering properties of a solid material to have a predetermined energy band characteristic by forming empty-spaced regions in said solid material, said empty-spaced regions being arranged in a pattern, said pattern providing said solid material with said predetermined energy band characteristic.
Dependencies are inferred from the claim text.