Diaphragm for chemical mechanical polisher
AssigneeApplied Materials, Inc.
InventorsPei Wei Yeh, Sun Kuo Lang
Life of this patent
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Abstract
A diaphragm for a chemical mechanical polisher is composed of a rubber layer and a fiber layer. The size and shape of the diaphragm are suitably designed according to a gap and relative shifting between the rotary unit and holder to prevent creasing of the diaphragm and thereby decrease friction with a sidewall of the rotary unit and holder. The fibrous layer can improve the strength of the diaphragm in order to improve the lifetime of the diaphragm, reduce the frequency of maintenance of the polisher, and increase throughput.
Claims21
A diaphragm for chemical mechanical polisher, comprising:
- an elastic layer to connect a rotary unit and a holder, wherein the holder is fitted into the rotary unit, and a gap between the rotary unit and the holder is sealed by the elastic layer;
- and
- a fibrous layer attached on the elastic layer to reinforce strength of the elastic layer.
A diaphragm for a chemical mechanical polisher, comprising:
- an external sealing ring mounted on an internal sidewall of a rotary unit;
- an internal sealing ring mounted on an external sidewall of an holder, wherein the holder is fitted into the rotary unit, and the external sidewall of the holder is adjacent to the internal sidewall of the rotary unit;
- and
- a connect ring smoothly connected between the external sealing ring and the internal sealing ring, wherein the width of the connect ring is designed according to a gap distance and a maximum relative shift distance between the external sealing ring and the internal seal ring to reduce creasing of the connect ring.
A diaphragm for a chemical mechanical polisher, comprising:
- an external sealing ring mounted on an internal sidewall of a rotary unit;
- an internal sealing ring mounted on an external sidewall of an holder, wherein the holder is fitted into the rotary unit, and the external sidewall of the holder is adjacent to the internal sidewall of the rotary unit;
- and
- a connect ring smoothly connected between the external sealing ring and the internal sealing ring, wherein the width of the connect ring is designed according to a gap distance and a maximum relative shift distance between the external sealing ring and the internal seal ring to reduce creasing of the connect ring,
- wherein each of the external sealing ring, the connect ring, and the internal ring are composed of a fibrous layer and an elastic layer.
A chemical mechanical polisher, comprising:
- a rotary unit;
- a holder fitted into the rotary unit;
- and
- a diaphragm composed of a rubber layer and a fibrous layer connects the rotary unit and the holder, and seals a gap between the rotary unit and the holder.
Dependencies are inferred from the claim text.