Fluid ejection device having an integrated filter and method of manufacture

A fluid ejection device comprising:

• a first substrate having a first surface and a second surface, the first substrate defining a fluid supply conduit;
• a stack of thin film layers having a first surface and a second surface, the first surface of the stack of thin film layers being affixed to the second surface of the first substrate, the stack of thin film layers including at least one fluid energizing element;
• and
• a chamber layer having a first surface affixed to the second surface of the stack of thin film layers, and a second surface, the chamber layer defining at least one firing chamber positioned over the at least one fluid energizing element of the stack of thin film layers, wherein one of the stack of thin film layers and the chamber layer defines a plurality of fluid filter openings in fluid communication with the fluid supply conduit of the first substrate, each fluid filter opening of the plurality of fluid filter openings extending only through one of the stack of thin film layers and the chamber layer from the first surface to the second surface thereof, the plurality of fluid filter openings functioning as a fluid filter.

An ink jet printhead comprising:

• a first substrate having a first surface and a second surface, the first substrate defining an ink fluid supply conduit;
• a stack of thin film layers having a first surface and a second surface, the first surface of the stack of thin film layers being affixed to the second surface of the first substrate, the stack of thin film layers including at least one ink energizing element;
• a barrier layer having a first surface and a second surface, the first surface of the barrier layer being affixed to the second surface of the stack of thin film layers, the barrier layer defining a plurality of fluid filter openings in fluid communication with the ink fluid supply conduit of the first substrate, each fluid filter opening of the plurality of fluid filter openings extending only through the barrier layer from the first surface to the second surface thereof, the plurality of fluid filter openings functioning as an ink fluid filter;
• and
• an orifice layer having a first surface affixed to the second surface of the barrier layer, and an exterior second surface, the orifice layer defining at least one firing chamber in fluid communication with the plurality of fluid filter openings of the barrier layer, the at least one firing chamber being positioned over the at least one ink energizing element of the stack of thin film layers, with the at least one firing chamber opening through at least one nozzle aperture in the exterior second surface of the orifice layer.