Methods and apparatus for delivering high purity liquids with low vapor pressure
AssigneesL'Air Liquide - Societe Anonyme a'Directiore et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, American Air Liquide, Inc.
InventorGregory M. Jursich
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Abstract
Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filter media, and a gas filter media positioned within said means adapted to hold a gas filter media, the gas inlet having a gas inlet valve, the liquid outlet having a liquid outlet valve.
Claims21
A container for delivery of high purity reactive liquids using gaseous assist, the container comprising:
- a) a container body containing at least a cavity therein;
- b) a gas inlet in fluid communication with said cavity and including a gas in let valve;
- c) a reactive liquid outlet in fluid communication with said cavity and including a liquid outlet valve for conveying the high purity reactive liquid therefrom
- d) a gas filter media;
- and
- e) a means adapted to hold said gas filter media and being in fluid communication with and downstream of said inlet valve, wherein said gas filter media is positioned within said means and prevents air impurities from entering said cavity from said gas inlet.
Dependencies are inferred from the claim text.