Independent-excitation cross-coupled differential-pressure transducer

A method for matching the output characteristics of a first and a second pressure sensor comprising the steps of:

• applying a first excitation to the first pressure sensor;
• applying a second excitation different than said first excitation to the second pressure sensor;
• independently adjusting the first and second excitations to increase or decrease the sensitivities of the first and second sensors to substantially match each other;
• and
• cross-coupling the outputs of the sensors to reduce the offset difference errors between the pressure sensors.

A pressure measuring means comprising:

• a first pressure sensor having a first sensitivity;
• a second pressure sensor having a second sensitivity different than the first sensitivity;
• a first excitement means for exciting the first pressure sensor at a first excitement level;
• a second excitement means for exciting the second pressure sensor at a second excitement level different than the first excitement, the first and second excitement means independently adjustable to increase or decrease the sensitivities of the first and second sensors to substantially match each other;
• and
• means for cross-coupling the outputs of the sensors to reduce the offset difference errors between the pressure sensors.

A pressure transducer apparatus comprising:

• a housing having a first pressure intake and a second pressure intake, each intake extending outwardly from the housing;
• a first pressure chamber and a second pressure chamber, the first pressure chamber coupled to the first pressure intake and housing a first pressure sensor having a first sensitivity and excited by a first voltage, and the second pressure chamber coupled to the second pressure intake and housing a second pressure sensor having a second sensitivity different from the first sensitivity and excited by a second voltage different from said first voltage, wherein the first and second voltages are independently adjustable to increase or decrease the sensitivities of the first and second sensors to substantially match each other, and wherein the outputs of the first and second pressure sensors are cross-coupled to each other to reduce offset difference errors between the first and second pressure sensors;
• and
• a substrate positioned with the housing, the first and second pressure sensors being mounted on the substrate, wherein the first and second pressure chambers are bonded to the substrate.