Micro-electro-mechanical systems ultra-sensitive accelerometer

A high sensitivity micro-electro-mechanical optical accelerometer comprising:

• an interferometer, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is flexibly suspended adjacent and parallel to a second of said surfaces so that a gap exists therebetween;
• a source of variable electrostatic potential for providing a selected electrostatic potential between said first and second surfaces so that the said gap is adjustable;
• a proof mass attached to said flexibly suspended first surface;
• a photosensor attached to said second surface outside of said gap;
• and
• a source of monochromatic light, said light for irradiating said photosensor through said first and second surfaces wherein said light is also partially reflected between said surfaces;
• wherein said sensitivity of said accelerometer is variable by adjusting said gap, and is variable by activating and de-activating said light at a selected frequency, whereby a change in said gap due to an acceleration force is sensed by a change in said light as detected by said photosensor.

A high sensitivity micro-electromechanical optical accelerometer comprising:

• a Fabry-Perot interferometer, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is flexibly suspended adjacent and parallel to a second of said surfaces so that a gap exists therebetween;
• a source of variable electrostatic potential for providing a selected electrostatic potential between said first and second surfaces so that said gap is adjustable;
• a proof mass attached to said flexibly suspended first surface;
• a photodiode is attached to said second surface outside of said gap;
• and
• a source of variable power, fixed wavelength, laser light, said light for irradiating said photodiode through said first and second surfaces wherein said light is also partially reflected between said surfaces;
• wherein said sensitivity of said accelerometer is variable by adjusting said gap, said power of said light and by activating and de-activating said light at a selected frequency, whereby a change in said gap due to an acceleration force is sensed by a change in said light as detected by said photodiode.