Container made of a light metal alloy and process for its manufacture
AssigneeAlcan Technology & Management Ltd.
InventorsUlf Hodel, Reinhold Gitter
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Abstract
A container, in particular a container with a tube-shaped wall, made of a light metal alloy for use as a reaction chamber in a process for manufacturing wafers. The container wall is made by way of extrusion or ring-rolling, and the container wall is made from a metallic, aluminum-based material with a magnesium content between 1.2 and 2.0 wt. %. The elements Cu, Fe, Si are present in amounts less than 0.5 wt. %. This container wall may also be shaped in one piece as container with a base plate.
Claims4
A ring-rolled container made of light metal alloy for use as a reaction chamber in a process for manufacturing wafers, the container comprising a ring-rolled container wall from a metallic, aluminum-based material with a magnesium content between 1.2 and 2.0 wt. %, whereby Cu, Fe, Si are present in amounts less than 0.5 wt. %.
A process for manufacturing a container made of a light metal alloy for use as a reaction chamber for manufacturing wafers, the container comprising a container wall, the process comprising the step of ring-rolling the container wall from a metallic, aluminum-based material with a magnesium content between 1.2 and 2.0 wt. %, whereby elements Cu, Fe, Si are present in amounts less than 0.5 wt. %.
Dependencies are inferred from the claim text.