Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit
AssigneeSeiko Epson Corporation
InventorsTsuyoshi Kitahara, Hiroshi Arai
Life of this patent
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Abstract
A dummy piezoelectric element (7) is disposed at least at one of the ends of an array of piezoelectric vibration elements. A region not including internal electrodes is provided in the vicinity of the outer side surface of the dummy piezoelectric vibration element 7 to be formed. When the outer side surface of the dummy piezoelectric element 7 is cut, a shift of a cutting line from a correct cutting line, which is due to high hardness of the internal electrodes, is minimized.
Claims42
An inkjet recording head comprising:
- pressure generating chambers;
- and
- a piezoelectric vibration element unit including:
- a substrate;
- and
- a plurality of axially expandable piezoelectric vibration elements arranged on the substrate to form an array, each of the piezoelectric vibration elements being formed of piezoelectric material and internal electrodes that are alternately layered, each of the piezoelectric vibration elements increasing and decreasing volume of an associated one of the pressure generating chambers, wherein
- a dummy piezoelectric vibration element is provided at least one end of the array of the piezoelectric vibration elements, and
- a region not including the internal electrodes is provided in the vicinity of a side surface of the dummy piezoelectric vibration element.
A piezoelectric vibration element unit, wherein
- a dummy piezoelectric vibration element is provided at least one end of the array of piezoelectric vibration elements, and
- a region not including internal electrodes is provided in the vicinity of an outer side surface of the dummy piezoelectric vibration element.
An actuator, comprising:
- a fixing plate;
- a plurality of piezoelectric vibrators fixed to the fixing plate in a row;
- a positioning member disposed at, at least one of opposite ends of the row of vibrators outside of the outermost one of the vibrators in a direction in which the vibrators are arranged in the row, the positioning member being fixed to the fixing plate,
- wherein the positioning member has a reference surface defined by homogenous material, and
- a holder with which the reference surface of the positioning member is contacted to position the piezoelectric vibrators with respect to the holder.
An actuator, comprising:
- a fixing plate;
- a plurality of piezoelectric vibrators fixed to the fixing plate in a row;
- and
- a positioning member disposed at, at least one of opposite ends of the row of vibrators outside of the outermost one of the vibrators in a direction in which the vibrators are arranged in the row, the positioning member being fixed to the fixing plate,
- wherein the positioning member has a reference surface defined by homogenous material,
- wherein the homogeneous material is lower in hardness than internal electrodes embedded in the piezoelectric vibrators.
An actuator, comprising:
- a fixing plate;
- a plurality of piezoelectric vibrators fixed to the fixing plate in a row;
- and
- a positioning member disposed at, at least one of opposite ends of the row of vibrators outside of the outermost one of the vibrators in a direction in which the vibrators are arranged in the row, the positioning member being fixed to the fixing plate,
- wherein the positioning member has a reference surface defined by homogenous material,
- wherein internal electrodes are embedded in the positioning member so as not to be exposed on the reference surface.
Dependencies are inferred from the claim text.