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US 6,578,816 B1Granted
Active micromechanical air valve for pressure control and method for making same
AssigneeInternational Business Machines Corporation
InventorJeffrey S. Lille
Life of this patent
Estimating the term…
Abstract
An active micromechanical air valve for pressure control in a disk drive and method for making the same is disclosed. A first layer having a first thermal coefficient of expansion and a second layer having a second thermal coefficient of expansion are formed. The first layer and the second layer are configured to form a membrane. The first and second layer engage in a closed state to prevent air flow there between in a first thermal state and open to allow air flow there between in a second thermal state.
Claims10
An active micromechanical air valve for providing pressure control, comprising:
- a first layer having a first thermal coefficient of expansion;
- a second layer having a second thermal coefficient of expansion;
- wherein the first layer and the second layer are configured to form a membrane, the first and second layer engaging in a closed state to prevent air flow therebetween in a first thermal state and opening to allow air flow therebetween in a second thermal state.
Dependencies are inferred from the claim text.