Method of controlling manufacturing process of photoelectric conversion apparatus

A method of controlling the manufacturing process of a photoelectric conversion apparatus, said manufacturing process comprising the steps of successively forming a transparent electrode layer, a semiconductor layer and a reverse electrode layer in a laminated fashion on one surface of a transparent substrate, laser-scribing each of these layers as formed to form a plurality of solar cells, electrically connecting these solar cells to form a solar cell module, laser-scribing the peripheral portion of the transparent substrate of the solar cell module to electrically separate the power generation region of the solar cell module from the peripheral region to obtain a photoelectric conversion apparatus, and inspecting the resultant photoelectric conversion apparatus, wherein said controlling method comprises the step of putting a mark for controlling the manufacturing process in a peripheral region on an another surface of said transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of the transparent electrode layer, the semiconductor layer and the reverse electrode layer, said mark being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.