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US 6,578,588 B2Granted
Unified strip/cleaning apparatus
AssigneeLG.Phillips LCD Co., Ltd.
InventorIl Ryong Park
Life of this patent
Estimating the term…
Abstract
A unified strip/cleaning apparatus wherein a strip device is integrated with a cleaning device. In the apparatus, a strip line removes resin on a substrate and a cleaning line is provided under the strip line to clean and dry the substrate. A loader supplies the substrate to the strip line, and an unloader receives the substrate from the cleaning line. Accordingly, the installation space can be minimized.
Claims8
A unified strip/cleaning apparatus, comprising:
- a strip line for removing a resin on a substrate;
- and
- a cleaning line disposed below the strip line to clean and dry the substrate;
- and
- an elevator arranged to directly convey the substrate from the strip line to the cleaning line.
2 more elements
Dependencies are inferred from the claim text.