Multi-axis micro gyro structure
AssigneeMicrosensors, Inc.
InventorYing Wen Hsu
Life of this patent
Estimating the term…
Abstract
A three-axis micro-gyro structure having first and second micro-gyro devices that measure angular velocity around first and second rate axes extending in a plane of the micro-gyro structure and a third micro-gyro that measures angular velocity around a third rate axis perpendicular to the plane of the micro-gyro structure.
Claims52
A unitary three-axis micro-gyro structure that comprises:
- a monolithic substrate that defines a plane of the micro-gyro, and
- three micro-gyro devices formed simultaneously as a layer on the substrate by successive steps of depositing material, delineating desired material shapes by lithography, and etching to remove unwanted material,
- the first micro-gyro device being so constructed as to measure angular velocity of the micro-gyro structure around a first rate axis extending in the plane of the micro-gyro,
- the second micro-gyro device being so constructed as to measure angular velocity of the micro gyro structure around a second rate axis extending in the plane of the micro-gyro and perpendicular to the first rate axis;
- and
- the third micro-gyro device being so constructed as to measure angular velocity of the micro-gyro structure around a third rate axis perpendicular to the plane of the micro-gyro.
A three-axis micro-gyro structure of planar construction comprising:
- first and second micro-gyro devices that measure angular velocity around first and second rate axes extending in the plane of the micro-gyro structure;
- and
- a third micro-gyro device that measures angular velocity around a third rate axis perpendicular to the plane of the micro-gyro structure.
A three-axis micro-gyro structure of planar construction comprising:
- first and second micro-gyro devices that are substantially identical in construction,
- the first and second micro-gyro devices being constructed as to measure angular velocity of the micro-gyro structure around first and second rate axes extending in the plane of the micro-gyro structure,
- the first and second micro-gyro devices being oriented relative to one another in a plane of the micro-gyro structure to position the second rate axis perpendicular to the first rate axis;
- and
- a third micro-gyro device being constructed as to measure angular velocity of the micro-gyro structure around a third rate axis perpendicular to the plane of the micro-gyro structure.
A three-axis micro-gyro structure comprising:
- a planar substrate;
- a first micro-gyro device supported by the planar substrate and constructed as to measure angular velocity around a first rate axis extending in the plane of the substrate,
- a second micro-gyro device supported by the planar substrate and constructed as to measure angular velocity around a second rate axis extending in the plane of the substrate and perpendicular to the first rate axis;
- and
- a third micro-gyro device supported by the planar substrate and constructed as to measure angular velocity of the micro-gyro structure around a third rate axis perpendicular to the plane of the substrate.
A method of measuring angular velocity about three orthogonal axes comprising the steps of:
- providing first, second and third micro-gyros on a planar substrate;
- orienting the first micro-gyro to measure angular velocity about a first axis parallel to the substrate;
- orienting the second micro-gyro to measure angular velocity about a second axis perpendicular to the first axis and parallel to the substrate;
- and
- orienting the third micro-gyro to measure angular velocity about a third axis perpendicular to the substrate.
Dependencies are inferred from the claim text.