Synthetic quartz glass for optical use, heat treatment method and heat treatment apparatus for the same
AssigneesHeraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
InventorsTetsuji Ueda, Akira Fujinoki, Hiroyuki Nishimura
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Abstract
A method for heat treating a synthetic quartz glass for optical use in a heating furnace, that comprises covering the surroundings of a synthetic quartz glass body with a SiO2 powder having a mean dissolved hydrogen molecule concentration of 1×1019 molecules/cm3 or higher, and then heat treating the body.
Claims20
A method for heat treating a synthetic quartz glass body for optical use, comprising heating the quartz glass body in a heating furnace while said quartz glass body is covered with an SiO2 powder, wherein the SiO2 powder has a mean dissolved hydrogen molecule concentration of 1×1019 molecules/cm3 or higher.
Dependencies are inferred from the claim text.